Scanning probe lithography

Scanning probe lithography describe a set of lithographic methods in which a microscopic stylus is mechanically moved across a surface to form a pattern, either by mechanically deforming a soft film on the surface designed for this purpose (nanoimprint lithography), or by transferring a chemical species to the surface (Dip Pen Nanolithography).

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v • d • e Scanning probe microscopy
Common microscopes	Atomic force microscope · Tapping AFM · Scanning tunneling microscope
Other microscopes	Electrostatic force microscope · Electrochemical scanning tunneling microscope · Kelvin probe force microscope · Magnetic force microscope · Magnetic resonance force microscopy · Near-field scanning optical microscope · Photothermal microspectroscopy · Scanning capacitance microscopy · Scanning gate microscopy · Scanning Hall probe microscope · Scanning ion-conductance microscopy · Spin polarized scanning tunneling microscopy · Scanning voltage microscopy
Applications	Scanning probe lithography · Dip-Pen Nanolithography · Feature-oriented scanning · IBM Millipede
See also	Nanotechnology · Microscope · Microscopy

v • d • e Nanolithography
Techniques	Soft lithography · Nanoimprint lithography · Scanning probe lithography · Electron beam lithography · Extreme UV lithography · X-ray lithography
See also	Nanotechnology · Photolithography · Nanoelectronics